The scope of this conference is to bring together designers and users of test structures to discuss recent developments and futures directions.
Original papers are solicited presenting new developments in topics relevant to ICMTS, including but not limited to, test structures measurements and results, about:
R&D and Manufacture of IC, M(N)EMS, Sensors, Actuators, Bio, solar, displays, and emergent technologies.
Material – Process – New technologies Characterizations.
New devices – Memory Cells – Arrays.
DC – Pulsed – RF: measurements techniques and applications.
Design methods – Verification – Metrology.
Devices and Circuits Modeling – Parameter Extraction.
Matching – Variability.
Reliability – Wafer level / thermal Product Failure Analysis & prediction.
Yield Enhancement – Production Process Control.
Measurements – Statistical – Probing – Throughput - Analysis – Strategies.
03月27日
2017
03月30日
2017
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