As space and terrestrial applications at submillimetre-wave and THz frequencies are evolving, there is a need for new technology solutions providing increasing frequencies, larger bandwidths, reconfigurability, low-weight and size, and product uniformity and volume manufacturability. Advanced radiometre and radar imaging systems have already proven the benefits of novel technologies, including silicon micromachining, and other applications are now closely following. The new demands at these very high frequencies are currently tried to be met by recent development in high-precision milling, additive manufacturing strategies or micromachining processes with photolithographic technology. Within the latter approach, the currently most promising fabrication techniques are silicon deep reactive ion etching (DRIE) and thick-film polymer molds (for instance using SU-8) for forming high performance sub-THz waveguides. Improved fabrication and metal coating processes for components/systems including tunable elements using also MEMS technology will be explored in this workshop. The target will be the manufacturing of components / complete systems at submillimetre-wave and THz frequencies for a wide range of possible applications. The fundamentals as well as the latest results will be reviewed, making the workshop adequate both for the specialist and the newcomer. The contents of this workshop are coordinated with the workshop proposal “Fundamentals and Engineering Considerations of THz Technologies: from Devices to Applications” to provide to the conference attendees a broad and complementing experience of workshops on THz technology without redundant content, with the focus of our workshop being specifically novel fabrication technologies.