Micro-electromechanical systems (MEMS) have found their way to a multitude of applications in automotive or medical systems or consumer electronics. Due to their electro-mechanical functionalities, in many cases, MEMS offer solutionssuperior or unprecedented compared to pure micro-electronic concepts.

In addition, MEMS devices, circuits, and systems operating at radio frequencies (RF) represent an extremely promising area of research. RF-MEMS offer the potential to overcome serious restrictions of their micro-electronic counterparts such as parasitic effects, non-linearities, susceptibility to high operating voltages, or steady-state power consumption. Micro-electromechanical devices enable very compact high-Q filters and low-phase noise reference oscillators. Combined with distributed transmission line technology, compact tunable and reconfigurable filters and phase shifters can be composed.In order to ultimately exploit the inherent advantages of combined microelectronic and micro-electro-mechanical functionalities, advanced modelling and design strategies have been developed, aiming towards a unified design approach atdevice, circuit, and system levels.

Accordingly, this workshop presents an expert panel on advanced high-Q RF MEMS devices and multiphysical cross-layer circuit design for a multitude of circuit applications, including but also reaching well beyond MEMS switches. The workshop addresses young as well as advanced engineering scientists working in the fascinating field of RF-MEMS research.