The resources transformation efficiency of high input and sources of total factor productivity (TFP) are urgent issues for high-tech industries in Beijing during their development. The two-step empirical research based on factor analysis and DEA model has studied the technical efficiency in various industries from 1996 to 2010. Indexes are established on the basis of literature review and factor analysis dimension reduction. DEA-based Malmquist index and C2R model are used for calculation with its results used to conduct the projection analysis and establish the technical state matrix. According to the research, Electronics and Communications Equipment Manufacturing Industry and Computers and Office Equipment Manufacturing Industry are in the area where DEA is effective and technical progress grows; Pharmaceutical Industry and Medical Equipment and Instrument Manufacturing Industry are in the area where technical efficiency declines but technical progress grows; Aerospace Manufacturing Industry is in the area where both technical efficiency and technical progress decline. Technical progress is the key factor for TFP growth in various industries and technical efficiency became the main source for TFP only in Pharmaceutical Industry in 2006.